产品详情
简单介绍：
详情介绍：
Edwards iXH100 Semiconductor Dry Vacuum Pump
The iXH dry pump range sets new standards for harsh process capability, reliability and lower cost of ownership.
Features include:
- Wide temperature range allows you to optimise the pump for minimal by-product accumulation from condensation and plating
- iXH Mk2 dry pumps provide even longer service life on the harshest of processes and can provide significant improvements in power efficiency
- Innovative pump seal technology can lengthen process life and reduce your leakage risks
- Available with Xcede technology for enhanced corrosion resistance.
