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  • 产品名称:真空传输阀V73-P_Two-way sealing, LAM facility

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  • 产品厂商:Edwards
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Valve Outside

Fitting Standard Nonstandard
Gate Size (mm) 28mm x 222mm (1.1 x 8.7inch)
Pressure Range 1.0xE-3 ~ 1.2xE5 Pa (abs)
Differential pressureon the gate in closing direction ≤ 0.12 Mpa
in opening direction ≤ 0.12 Mpa
Differential pressure at opening ≤ 0.01 MPa
Helium leak rate Housing < 1.0xE-10 Pa*㎥/sec
Seat (Gate) PM: <1.3xE-5 Pa*㎥/sec (Hard Anodizing)
TM: <1.3xE-10 Pa*㎥/sec
Open / Close Time <2sec (Switch to switch)
Mounting Posture Drive section is turnedto the top or bottom
Life Cycles Mechanism 3,000,000 cycles
Bellows 3,000,000 cycles
O-Ring (Seal) 1,000,000 cycles
Lubrication 1,000,000 cycles(under clean operating conditions)
Bake-out Temperature Max. 120°C (Max. 60°C for air cylinders)
Pneumatic pressure(Compressed air pressure) 0.5 Mpa (Tolerance Level : 0.45~0.6 Mpa)
Weight <16 kgf
Material Gate (Blade) AL6061
Bellows AM350
Seal plate (Bonnet) AL6061
Actuator AL6061, STS304, Etc
Shaft (Stem) STS304
Gate (Blade) seal FKM (VITON®)
Pneumatic seal FKM (VITON®)
Grease (Pneumatic) PFPEGrease
Surface treatment Gate (Blade) (PM) Anodizing (TM) Anodizing
Shaft (Stem) Bare
Actuator Anodizing
Speed controller connection tube diameter 6ea Φ4Tube, Meter-out type°

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