产品详情
  • 产品名称:真空传输阀V70-P_Standard Type(Double Cylinder)

  • 产品型号:
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
详情介绍:

Valve Outside

Fitting Standard Nonstandard
Gate Size (mm) 39.6mmx 329mm
Pressure Range <1.0 X E-7 ~ 1.2 X E5 Pa (abs)
Helium Leak Rate External <1.0 X E-10 Pa*㎥/sec
Internal <1.3 X E-10 Pa*㎥/sec
Feed Through Welded bellows seal
Pneumatic Actuator Type Double acting
Air Connection ODØ6 / one-touch type / Speed Controller (Meter-out)
Air Pressure 0.5MPa(Tolerance level : 0.45 ~ 0.6 Mpa)
Air Less Lock Open Lock
Close Lock
Life Cycles Mechanism 3,000,000
Bellows 3,000,000
O-Ring(Seal) 1,000,000
Lubrication 1,000,000
Temperature Gate(seat) ≤120 °C
Actuator ≤60 °C
Lubrication Vacuum inside Non lubrication
Mechanism PFPE Grease
Materials Valve housing AL6061
Gate(seat) AL6061
Bonnet AL6061
Shaft(Stem) STS304
Bellows AM350
Bellows end Piece STS304
Vacuum seal FKM
Pneumatic seal FKM
Surface Treatment Valve housing Bare
Gate(Blade) Bare
Actuator Anodizing

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