产品详情
简单介绍：
详情介绍：
| Fitting Standard | SEMI E21.1-1296 | |
|---|---|---|
| Gate Size (mm) | 50mmx 716mm | |
| Pressure Range | 1.0xE-7Pa to 1.2xE5 Pa(abs) | |
| Helium Leak Rate | External | N/A |
| Internal | <1.0xE-10 Pa*㎥/sec | |
| Feed Through | O-RingShaft Seal | |
| Pneumatic Actuator Type | Double Acting | |
| Air Connection | ODØ 6, Speed Controller with Indicator (Meter-out) | |
| Air Pressure | 0.55MPa (Tolerance level : 0.5~0.6 MPa) | |
| Air Less Lock | Open | N/A |
| Close | N/A | |
| Life Cycles | Mechanism | 3,000,000 |
| Bellows | 3,000,000 | |
| O-Ring(Seal) | 1,000,000 | |
| Lubrication | 1,000,000 | |
| Temperature | Gate(Seat) | ≤120°C |
| Actuator | ≤60°C | |
| Lubrication | Vacuum Inside | Non Lubrication |
| Mechanism | PFPE Grease | |
| Materials | Valve Housing | N/A |
| Gate(Seat) | AL6061 | |
| Bonnet | AL6061 | |
| Shaft(Stem) | STS304 | |
| Mechanism(Cylinder) | AL6061 | |
| Bellows | AM350 | |
| Bellows End Piece | STS304 | |
| Vacuum Seal | FKM | |
| Pneumatic Seal | FKM | |
| Surface Treatment | Valve Body | N/A |
| Gate(Seat) | Anodizing | |
