产品详情
简单介绍：
详情介绍：
| Fitting Standard | SEMI E21.1-1296 | |
|---|---|---|
| Gate Size (mm) | 50mm x 336mm | |
| Pressure Range | 1.0xE-7 Pa ~ 1.0xE5 Pa | |
| Helium Leak Rate | External | N/A |
| Internal | < 1.0xE-10 Pa*㎥/sec | |
| Feed Through | Welded Bellows | |
| Pneumatic Actuator Type | Double acting | |
| Air Connection | OD Ø6 Speed Coutroller with Indicator (Meter-Out) | |
| Air Pressure | 0.55 MPa (Tolerance level : 0.5~0.6 MPa) | |
| Air Less Lock | Open | N/A |
| Close | Lock | |
| Life Cycles | Mechanism | 3,000,000 |
| Bellows | N/A | |
| O-Ring (Seal) | 1,000,000 | |
| Lubrication | 1,000,000 | |
| Temperature | Gate (Seat) | MAX. 120℃ |
| Actuator | MAX. 60℃ | |
| Lubrication | Vacuum Inside | Non Lubrication |
| Mechanism | PFPE Grease | |
| Materials | Valve Housing | AL6061 |
| Gate(Seat) | AL6061 | |
| Bonnet | AL6061 | |
| Shaft (Stem) | STS304 | |
| Bellows | AM350 | |
| Bellows End Piece | STS304 | |
| Gate Seal | FKM | |
| Bonnet Seal | N/A | |
| Vacuum Seal | N/A | |
| Pneumatic Seal | FKM | |
| Surface Treatment | Valve Body | Vibration Sanding |
| Gate (Seat) | Bare | |
