产品详情
简单介绍：
详情介绍：
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Valve Outside
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Size Table
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Fitting Standard SEMI E21.1-1296 Gate Size (mm) 50mm x 336mm Pressure Range 1.0 X E-7 ~ 1.0 X E5 Pa (abs) Helium Leak Rate External N/A Internal <1.0X E-10 Pa*㎥/sec Feed Through Welded bellows Pneumatic Actuator Type Double acting Air Connection ODØ6 / one-touch type / Speed Controller (Meter-out) Air Pressure 0.5MPa(Tolerance level : 0.45 ~ 0.6 MPa) Air Less Lock Open N/A Close Lock Life Cycles Mechanism 3,000,000 Bellows 3,000,000 O-Ring(Seal) 1,000,000 Lubrication 1,000,000 Temperature Valve Body <150℃ Actuator <80℃ Lubrication Vacuum Inside Non lubrication Mechanism PFPE Grease Air Cylinder PAO Grease Materials Valve Housing N/A Gate(Seat) AL6061 Bonnet AL6061 Shaft(Stem) STS304 Bellows AM350 Bellows End Piece STS304 Gate seal FKM Bonnet Seal N/A Vacuum seal N/A Pneumatic Seal FKM Surface Treatment Valve Housing N/A Gate(Seat) Bare
