产品详情
简单介绍：
详情介绍：
Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to
perform to the highest operating standards. Reliability and high
performance are achieved by extending service life, improving uptime and
increasing productivity, while minimizing footprint and cost of
ownership.
The iH1800HTX is specifically designed for processes
such as 300 mm LPCVD Nitride, where higher operating temperatures are
required to prevent process gas condensation.
| Peak Speed | 1,800 m3h-1 |
| 1,060 cfm | |
| 30,000 l min-1 | |
| Ultimate Vacuum | 1 x 10-3 mbar |
| 7.5 x 10-4 Torr | |
| 0.1 Pa | |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet Connection | ISO160 |
| Outlet Connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop | 240 l h-1 |
| 4 l min-1 | |
| Weight | 502 kg |
| Power input at ultimate | 4.1 kW |
| Rated motor power | 7.0 kW |
| Oil Capacity | 1.6 l |
All figures are typical without gas ballast.
Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW A59040908 / A590-40-908 iH1800 460V 60Hz three-phase A59040945 / A590-40-945 iH1800 200/208V 60Hz 3-phase A59040946 / A590-40-946 iH1800 380/415V 50Hz 3-phase A59040957 / A590-40-957 iH1800 230V 60Hz 3-phase A59060945 / A590-60-945 iH1800 200/208V 50Hz 3-phase A59042908 / A590-42-908 iH1800HTX 460V 60Hz 3-phase A59042945 / A590-42-945 iH1800HTX 200/208V 50/60Hz 3-phase A59042946 / A590-42-946 iH1800HTX 380/415V 50Hz 3-phase A59042957 / A590-42-957 iH1800HTX 230V 60Hz 3-phase A59062945 / A590-62-945 iH1800HTX 200/208V 50/60Hz 3-phase
