产品详情
简单介绍：
详情介绍：
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
|
Peak speed |
165 m3h-1 97 cfm 2,750 lmin-1 |
| Ultimate vacuum |
1 x 10-2 mbar 7.5 x 10-3 Torr 1 Pa |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO63 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop |
120 lh-1 2 lmin-1 |
| Weight | 244 kg |
| Power input at ultimate | 3.1 kW |
| Rated motor power | 5.0 kW |
| Oil capacity | 0.85 l |
All figures are typical without gas ballast.
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW A59010908 / A590-10-908 iH160 460V 60Hz three-phase A59010945 / A590-10-945 iH160 200/208V 50/60Hz 3-phase A59010946 / A590-10-946 iH160 380/415V 50Hz 3-phase A59010957 / A590-10-957 iH160 230V 60Hz 3-phase A53391945 / A533-91-945 iH160 200-208V 50/60Hz A53506945 / A535-06-945 iH160 (VA) 200-208 50/60HZ
