产品详情
  • 产品名称:IXL120 爱德华半导体真空干泵

  • 产品型号:
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
iXL120 爱德华半导体真空干泵-edwards iXL120 是紧凑型低能量的 110 m3h-1 干泵,用于水处理和其他清洁工作应用。它可快速抽空负载锁定舱室,能耗极低。 Edwards ixL120 是可用于负载锁定和清洁应用的且轻的泵之一。 其低振动和低噪音级别的使其适合于安装在机台上或工厂的夹心层中,从而有助于节省宝贵的工厂地面空间。 通过环保模式可在空闲期间降低设备使用率,从而降低操作成本并帮助保护环境!
详情介绍:


    
Typical peak pumping speed (no gas purge/cold pump)     110 m3/h-1 / 65 cfm
Ultimate pressure 0.01 mbar / 8 mTorr
Pump inlet flange ISO-63 / NW50
Exhaust gas outlet NW25
Intended use Indoor use
Operating ambient temperature range 5 to 40°C
Storage ambient temperature range -45 to 55°C
Maximum relative humidity 80% for temperatures up to 31°C decreasing linearly to 50% relative humidity at 40°C
Maximum operating altitude up to 2,000 m
Pollution degree II (IEC 61010) (Normally only non-conductive pollution occurs. Occasionally, however, temporary conductivity caused by condensation must be expected)
Atmosphere Non flammable and non-corrosive
Degree of protection provided by enclosure IP31D (EN60529: Degrees of protection provided by enclosures)
Dimensions 450 x 230 x 275 mm
Mass 59 kg
Noise level (at ultimate) < 55 dB(A)
Vibration level at inlet < 1.5 mm s-1
Vibration to the floor (when docked) < 0.05 mm s-1
Initial force to push the pump 0.06 kN
Sustained force to push the pump 0.04 kN
Warm up time to nominal pumping performance 45 min

订货信息:


Edwards MODEL iXL120 Semiconductor Dry Vacuum Pump - NEW

A541-13-010 / A54113010  iXL120E  200-460V 3/8 QC Water Fittings
A541-13-020 / A54113020  iXL120E  200-460V 1/4 QC Water Fittings
A541-13-610 / A54113610  iXL120E  200-460V HIT 3/8 QC Water Fittings
A541-13-710 / A54113710  iXL120E  200-460V MCM 3/8 QC Water Fittings
A541-13-011 / A54113011  iXL120E  200-460V 3/8 QC Water Fittings Flow Cont Valve
A541-13-221 / A54113221  iXL120E  200-460V SPI 1/4 QC Water Fittings Flow Cont Valve
A541-13-611 / A54113611  iXL120E  200-460V HIT 3/8 QC Water Fittings Flow Cont Valve
A541-13-711 / A54113711  iXL120E  200-460V MCM 3/8 QC Water Fittings Flow Cont Valve

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